DOCUMENTS

 

Brochures

• KxS Semiconductor concentration monitor DCM-10

Manuals

• KxS Semiconductor concentration monitor DCM-10 manual

Certificates

• DNV Management System Certificate ISO 9001:2015
• DCM-10 ATEX certificate II 2/3G Ex ec mc IIC T4 Gb/Gc
• DCM-10 IECEx certiicate II 2/3G Ex ec mc IIC T4 Gb/Gc

Technical Notes

• Technical note 1.01.01  Refractive Index measurement principle for process control

Applications

• KxS Application Insights Semiconductor CMP slurry Insights
• Slurry Delivery Systems Defining Incoming CMP Slurry Density and Achieving Target Process Conctration Driven by Inline Metrology Unify CMP Engineers - ICPT_2022
• Inline Refractive Index-based Slurry Density Monitoring to Optimize Raw CMP Slurry Container Dispersion - ICPT_2023