KxS Semiconductor concentration monitor DCM-10

Introducing the KxS semiconductor monitor DCM-10, a cutting-edge optical refractometer designed for real-time monitoring of wet chemicals in almost all processing steps that involve wafer processing with liquid chemicals or mixtures. The DCM-10 is renowned for its high accuracy and reliability, making it an essential concentration monitoring tool for incoming chemical check, wafer cleaning, chemical etching and chemical mechanical planarization (CMP).

Advanced functionality

The DCM-10 operates with a 24 VDC input power supply and offers flexible communication options, including analog (4-20 mA) and digital (Modbus TCP). When using the analog signal, the digital port serves as a service port for configuration and diagnostics via a computer web browser, external display, or mobile device. All port options can be utilized simultaneously, providing seamless integration and monitoring capabilities.

Precision and calibration

Factory calibrated for refractive index measurements, the DCM-10 displays temperature-compensated concentration units in % by weight or g/cm³. This ensures accurate and consistent monitoring of chemical concentrations, critical for maintaining process integrity and quality.

Key features 

  • True standalone operation: All measurement functions contained within the sensor, eliminating the need for an external transmitter
  • Extra small footprint design: The compact sensor and flow are ideal and fit into fab tools and benches
  • Excellent flow properties: True full bore; Optimized laminar flow pattern with minimal shear force on liquid (Patent pending)
  • Easy installation: Connects with process line sizes of ¼, ⅜, ½, ¾, and 1 inch, using standard fittings
  • Dual-body construction: Optical components remain intact even if the flow cell is removed, ensuring consistent performance.
  • Material compatibility: Materials designed to withstand the demanding conditions of semiconductor processing in the basement and cleanroom environments